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The modelling and simulation of the dynamic behaviour of microelectromechanical structures (MEMS) characterized by low gas pressures <<

Akronym SimMEMS
Funding Ministerium für Wissenschaft, Forschung und Kunst (MWK) Baden-Württemberg
Request for Proposal Innovative Projekte / Kooperationsprojekte
Supporting Organisation Koordinierungsstelle Forschung der Hochschulen für Angewandte Wissenschaften in Baden-Württemberg
HFT project director Prof. Dr. Ursula Voß
Project Staff M.Sc. Jithin Mohan
Project partners Hochschule Reutlingen, RRI; Ansys Germany, 83624 Otterfing; Universität Stuttgart, Insitut für Aero- und Gasdynamik, Prof. Dr. Claus-Dieter Munz
Duration 01.09.2013 - 31.08.2015
Project description The goal of this project is to develop computer-assisted engineering (CAE) tools suitable for the simulation of microelectromechanical systems (MEMS) whose functions are highly dependent on damping facilitated by enclosed volumes of gas. The use of CAE tools throughout the design process is a prerequisite for the efficient development of marketable products. Tools of this type are nevertheless not yet available for all applications within the broad and continuously expanding field of microsystems technology. As a result of their small scale, all MEMS share the characteristic of being subject to a different set of physical laws than larger structures. Those laws require separate mathematical modelling, integration into numerical methods and implementation in appropriate tools – conventional tools cannot be applied to MEMS without modification. Macroscopic gas dynamics equations in particular are not valid at the low gas pressures encountered within microstructures. As a result, this project focuses on the development of specially adapted models and the application thereof to realistic, complex geometries. Microelectromechanical modules are generally designed together with other components as part of system simulation. This renders the full, transient calculation of detailed models too computation-intensive, which in turn necessitates the use of model reduction techniques that are already state-of-the-art in other fields. As those techniques are fundamentally different from the model reduction techniques used in the field of gas dynamics, this project aims to adapt the latter techniques for use in combination with MEMS. The level of analytical capability targeted by the project supports significant improvements in the design of gas-filled microstructures, which will in turn contribute to the enhanced usability of microsystems technology on an industrial scale.